Substrate processing apparatus and recording medium

There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Horita, Hideki, Yamamoto, Kazuyoshi, Okuno, Masanori, Asai, Kazuhide, Yonejima, Toshihiko
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING CONTROL OR REGULATING SYSTEMS IN GENERAL CONTROLLING FUNCTIONAL ELEMENTS OF SUCH SYSTEMS HEATING LIGHTING MECHANICAL ENGINEERING MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS ORELEMENTS PHYSICS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS REGULATING WEAPONS
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Beschreibung
Zusammenfassung:	There is provided a technique that includes: a main controller configured to execute a process recipe including a plurality of steps to perform a predetermined process on a substrate so as to acquire device data when executing the process recipe; and a storage part configured to store the acquired device data, wherein the main controller is configured to: acquire the device data in a predetermined specific step among the steps constituting the process recipe; calculate a value of the acquired device data in the specific step; compare the calculated value with a value of the device data in the specific step calculated at a time of previous execution of the process recipe; and generate an alarm when the calculated value shows a predefined tendency.