Cleaning method for workpiece and cleaning apparatus

A cleaning method capable of eliminating cleaning unrequired cleaning points is disclosed. The cleaning method is for a workpiece with foreign matter adhered, and the cleaning method includes: identifying cleaning points of the workpiece with the foreign matter adhered; substituting a true value to...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	Kawamori, Yoshiteru
Format:	Patent
Sprache:	eng
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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