Cleaning method for workpiece and cleaning apparatus

A cleaning method capable of eliminating cleaning unrequired cleaning points is disclosed. The cleaning method is for a workpiece with foreign matter adhered, and the cleaning method includes: identifying cleaning points of the workpiece with the foreign matter adhered; substituting a true value to a cleaning variable for the identified cleaning points; generating a cleaning liquid jet from a main nozzle; skipping a first cleaning section if the cleaning variable has a false value; and executing the first cleaning section to direct the main nozzle toward the cleaning points if the cleaning variable has a true value.