Cleaning method for workpiece and cleaning apparatus

Cleaning method for workpiece and cleaning apparatus

A cleaning method capable of eliminating cleaning unrequired cleaning points is disclosed. The cleaning method is for a workpiece with foreign matter adhered, and the cleaning method includes: identifying cleaning points of the workpiece with the foreign matter adhered; substituting a true value to...

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1. Verfasser: Kawamori, Yoshiteru
Format: Patent
Sprache:eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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creator Kawamori, Yoshiteru
description A cleaning method capable of eliminating cleaning unrequired cleaning points is disclosed. The cleaning method is for a workpiece with foreign matter adhered, and the cleaning method includes: identifying cleaning points of the workpiece with the foreign matter adhered; substituting a true value to a cleaning variable for the identified cleaning points; generating a cleaning liquid jet from a main nozzle; skipping a first cleaning section if the cleaning variable has a false value; and executing the first cleaning section to direct the main nozzle toward the cleaning points if the cleaning variable has a true value.
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subjects CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
title Cleaning method for workpiece and cleaning apparatus
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