Vacuum gate valve

A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive sound and vibrations, and also having high durability. The vac...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Iwabuchi, Toshiaki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A compact vacuum gate valve capable of reducing a kink and sliding between a seal material and a seal surface, achieving a low occurrence of particles, stably and reliably performing valve-body open-close movements, restricting impulsive sound and vibrations, and also having high durability. The vacuum gate valve includes housing bodies, a valve-body open/close driving body, and a stem provided with a valve body. Each of the housing bodies has therein a piston rod and a cam member with a cam groove. On each side of the valve-body open/close driving body, a cam roller and a fulcrum roller are provided. On an inner side of the housing body, a vertical movement guiding part and a stopper part are provided. A spring for causing the valve-body open/close driving body to ascend is provided between the valve-body open/close driving body and a fixed base part on a fixed side.