System on chip

A system on chip includes first to third nanowires extending in a second direction, first to third gate lines respectively surrounding the first to third nanowires, each of the first to third gate lines extending in a first direction across the second direction, a gate isolation region cutting the f...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Park, Sun-Young, Oh, Sang-Kyu, Bae, Moo-Gyu, Kim, Ha-young, Baek, Sang-Hoon, Do, Jung-Ho, Lee, Seung-Young
Format: Patent
Sprache:eng
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Zusammenfassung:A system on chip includes first to third nanowires extending in a second direction, first to third gate lines respectively surrounding the first to third nanowires, each of the first to third gate lines extending in a first direction across the second direction, a gate isolation region cutting the first to third gate lines and extending in the second direction, a first gate contact formed on the second gate line arranged between the first gate line and the third gate line, and electrically connecting the cut second gate line, a second gate contact formed on the first gate line, a third gate contact formed on the third gate line, a first metal line electrically connecting the second gate contact and the third gate contact; and a second metal line electrically connected to the first gate contact.