Method of manufacture of a semiconductor device

In order to prevent cracks from occurring at the corners of semiconductor dies after the semiconductor dies have been bonded to other substrates, an opening is formed adjacent to the corners of the semiconductor dies, and the openings are filled and overfilled with a buffer material that has physica...

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Bibliographische Detailangaben
Hauptverfasser: Li, Pai Yuan, Wu, Chih-Wei, Huang, Kuan-Yu, Huang, Sung-Hui, Kuo, Li-Chung, Lee, Long Hua, Shih, Ying-Ching
Format: Patent
Sprache:eng
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Zusammenfassung:In order to prevent cracks from occurring at the corners of semiconductor dies after the semiconductor dies have been bonded to other substrates, an opening is formed adjacent to the corners of the semiconductor dies, and the openings are filled and overfilled with a buffer material that has physical properties that are between the physical properties of the semiconductor die and an underfill material that is placed adjacent to the buffer material.