Semiconductor module, DIMM module, manufacturing method of semiconductor module, and manufacturing method of DIMM module
The present invention is intended to provide a semiconductor module and a DIMM module that are capable of stably supplying power to a plurality of stacked memory chips, a manufacturing method of the semiconductor module and a manufacturing method of the DIMM module. The semiconductor module 1 having...
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Sprache: | eng |
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Zusammenfassung: | The present invention is intended to provide a semiconductor module and a DIMM module that are capable of stably supplying power to a plurality of stacked memory chips, a manufacturing method of the semiconductor module and a manufacturing method of the DIMM module. The semiconductor module 1 having a plurality of memory chips 21 includes: a memory substrate 10 having a power supply circuit 12 exposed on an arrangement surface as one surface of the memory substrate 10; and at least one memory unit 20 arranged over the arrangement surface of the memory substrate 10. The memory unit 20 includes: the plurality of memory chips 21 stacked together such that a stacking direction D is along the arrangement surface; a through electrode 22 passing through the plurality of memory chips 21 in the stacking direction D; and an electrode layer 23 formed on one end surface in the stacking direction D and connected to the through electrode 22 and the power supply circuit 12. |
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