Leakage inspection device

A leakage inspection device includes an inspection chamber in which an inspection object is disposed to be filled with a tracer gas, and a circulation passage which connects a suction port disposed in the inspection chamber and a blowout port disposed at a position away from the suction port in the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Shimizu, Toshitaka, Yao, Takayuki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A leakage inspection device includes an inspection chamber in which an inspection object is disposed to be filled with a tracer gas, and a circulation passage which connects a suction port disposed in the inspection chamber and a blowout port disposed at a position away from the suction port in the inspection chamber with each other. The leakage inspection device includes a blower disposed in the circulation passage to circulate gas by sucking from the inspection chamber through the suction port and by blowing out from the blowout port. The leakage inspection device includes a detector configured to detect the tracer gas leaked from the inspection object and contained in the gas flowing through the circulation passage at a position separated by a predetermined distance or more from the blower toward the blowout port in the circulation passage.