Electrode/dielectric barrier material formation and structures
Methods, apparatuses, and systems related to forming a barrier material between an electrode and a dielectric material are described. An example method includes forming a dielectric material on a bottom electrode material of a storage node in a semiconductor fabrication process. The method further i...
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| creator | Kelkar, Sanket S Kim, Dojun Petz, Christopher W Rocklein, Matthew N Kraus, Brenda D |
| description | Methods, apparatuses, and systems related to forming a barrier material between an electrode and a dielectric material are described. An example method includes forming a dielectric material on a bottom electrode material of a storage node in a semiconductor fabrication process. The method further includes forming a barrier material on the dielectric material to reduce oxygen vacancies in the dielectric material. The method further includes forming a top electrode on the barrier material. |
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| title | Electrode/dielectric barrier material formation and structures |
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