Multilayer thin-film structure and phase shifting device using the same

Provided are a multilayer thin-film structure and a phase shifting device using the same. The multilayer thin-film structure includes at least one crystallization preventing layer and at least one dielectric layer that are alternately stacked. The at least one crystallization preventing layer includ...

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Bibliographische Detailangaben
Hauptverfasser: Kim, Yongsung, Lee, Jeongyub, Kim, Jaekwan, Lee, Changseung
Format: Patent
Sprache:eng
Schlagworte:
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