Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device
A liquid ejecting head includes a diaphragm that constitutes a part of a wall surface of a pressure chamber in which a liquid is filled, and a piezoelectric element that vibrates the diaphragm, in which the piezoelectric element includes a first electrode and a second electrode, and a piezoelectric...
Gespeichert in:
Hauptverfasser: | , |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | A liquid ejecting head includes a diaphragm that constitutes a part of a wall surface of a pressure chamber in which a liquid is filled, and a piezoelectric element that vibrates the diaphragm, in which the piezoelectric element includes a first electrode and a second electrode, and a piezoelectric layer including a first portion located between the first electrode and the second electrode and a second portion not overlapping at least one of the first electrode and the second electrode in plan view, a first surface at an opposite side of the first portion from the diaphragm and a second surface at an opposite side of the second portion from the diaphragm are different in position in a laminate direction of the first electrode, the piezoelectric layer, and the second electrode, and a second film thickness of the second portion is larger than a first film thickness of the first portion. |
---|