Laser irradiation device and method

A laser irradiation device includes: a beam generation unit generating a laser beam; a scan mirror unit adjusting a direction of the laser beam transmitted from the beam generation unit; and a rotating mirror reflecting the laser beam of which the direction is adjusted by the scan mirror unit. The r...

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Bibliographische Detailangaben
Hauptverfasser: Shon, Je-Ha, Tai, Lone-Wen, Kang, Ki-Seok, Choi, Byoung-Chan, Kim, Jong-Sik
Format: Patent
Sprache:eng
Schlagworte:
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Zusammenfassung:A laser irradiation device includes: a beam generation unit generating a laser beam; a scan mirror unit adjusting a direction of the laser beam transmitted from the beam generation unit; and a rotating mirror reflecting the laser beam of which the direction is adjusted by the scan mirror unit. The rotating mirror is provided to be rotatable so that the direction-adjusted laser beam is irradiated to an object to be processed while forming a linear laser beam on the object.