Laser irradiation device and method
A laser irradiation device includes: a beam generation unit generating a laser beam; a scan mirror unit adjusting a direction of the laser beam transmitted from the beam generation unit; and a rotating mirror reflecting the laser beam of which the direction is adjusted by the scan mirror unit. The r...
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Sprache: | eng |
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Zusammenfassung: | A laser irradiation device includes: a beam generation unit generating a laser beam; a scan mirror unit adjusting a direction of the laser beam transmitted from the beam generation unit; and a rotating mirror reflecting the laser beam of which the direction is adjusted by the scan mirror unit. The rotating mirror is provided to be rotatable so that the direction-adjusted laser beam is irradiated to an object to be processed while forming a linear laser beam on the object. |
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