Thin-film capacitor

In a thin-film capacitor, an electrode terminal layer and an electrode layer of a capacitor portion are connected to electrode terminals by via conductors that is formed to penetrate an insulating layer in a thickness direction thereof, and a short circuit wiring in the thickness direction is realiz...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Yoshikawa, Kazuhiro, Tomikawa, Mitsuhiro, Tsunoda, Koichi, Yoshida, Kenichi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:In a thin-film capacitor, an electrode terminal layer and an electrode layer of a capacitor portion are connected to electrode terminals by via conductors that is formed to penetrate an insulating layer in a thickness direction thereof, and a short circuit wiring in the thickness direction is realized by the via conductors. In the thin-film capacitor, an increase in the number of terminals in the plurality of electrode terminals is achieved, a decrease in length of a circuit wiring is achieved, and thus a thin-film capacitor with low-ESL has been achieved.