Ultra high vacuum cryogenic pumping apparatus with nanostructure material

Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivit...

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Bibliographische Detailangaben
Hauptverfasser: Chin, Wei, Lu, Victor Y, Anantharaman, Surendra Babu, Yang, Wen-Cheng, Kao, Chung-En
Format: Patent
Sprache:eng
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Zusammenfassung:Cryogenic pump apparatuses include nanostructure material to achieve an ultra-high vacuum level. The nanostructure material can be mixed with either an adsorbent material or a fixed glue layer which is utilized to fix the adsorbent material. The nanostructure material's good thermal conductivity and adsorption properties help to lower working temperature and extend regeneration cycle of the cryogenic pumps.