Semiconductor structures having a micro-battery and methods for making the same

The present disclosure provides an embodiment of an integrated structure that includes a first electrode of a first conductive material embedded in a first semiconductor substrate; a second electrode of a second conductive material embedded in a second semiconductor substrate; and a electrolyte disp...

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Bibliographische Detailangaben
Hauptverfasser: Chiu, Yi Hsun, Wang, I-Shi, Ni, Chyi-Tsong, Su, Ching-Hou
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure provides an embodiment of an integrated structure that includes a first electrode of a first conductive material embedded in a first semiconductor substrate; a second electrode of a second conductive material embedded in a second semiconductor substrate; and a electrolyte disposed between the first and second electrodes. The first and second semiconductor substrates are bonded together through bonding pads such that the first and second electrodes are enclosed between the first and second semiconductor substrates. The second conductive material is different from the first conductive material.