Microphone and method of testing a microphone

The microphone comprises a housing (1, 2), which has an inner volume (12) filled with a gas, an opening (10) of the housing, an acoustic sensor (3) arranged in the housing, a diaphragm (13) of the acoustic sensor located above the opening, and a heater (14) in the inner volume. The acoustic sensor m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Niederberger, Mark
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The microphone comprises a housing (1, 2), which has an inner volume (12) filled with a gas, an opening (10) of the housing, an acoustic sensor (3) arranged in the housing, a diaphragm (13) of the acoustic sensor located above the opening, and a heater (14) in the inner volume. The acoustic sensor may especially comprise a microelectromechanical system. The gas is heated from inside the inner volume to increase the pressure and generate a corresponding signal of the acoustic sensor (3). This signal can be used for self-calibration of the sensitivity or for self-diagnostics to check the function of the microphone.