Driver of sample holder for electron microscope and stage comprising same

Driver of sample holder for electron microscope and stage comprising same

A sample stage includes a sample holder that accommodates a sample and a first drive module, a second drive module, and a third drive module that are radially connected to the sample holder and allow the sample holder to have translational degrees of freedom in three directions and rotational degree...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Han, Cheolsu, Jeong, Jongman, Kim, Jin-Gyu, Lee, Sang-Chul
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS
OPTICS
PHYSICS
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Beschreibung
Zusammenfassung:A sample stage includes a sample holder that accommodates a sample and a first drive module, a second drive module, and a third drive module that are radially connected to the sample holder and allow the sample holder to have translational degrees of freedom in three directions and rotational degrees of freedom in at least two directions.