Ablative production device and method for a periodic line structure on a workpiece

The invention relates to an ablative production device and method for a periodic line structure on a workpiece. The device comprises a pulsed laser for generating ablative light, a phase mask arranged in the beam path of the ablative light, imaging optics arranged on an optical axis and a holder to...

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Bibliographische Detailangaben
Hauptverfasser: Meinertz, Joerg, Stark, Lars Henning, Ihlemann, Juergen
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The invention relates to an ablative production device and method for a periodic line structure on a workpiece. The device comprises a pulsed laser for generating ablative light, a phase mask arranged in the beam path of the ablative light, imaging optics arranged on an optical axis and a holder to hold the workpiece in an image plane. The phase mask produces a plurality of equidistant parallel lines in an object plane by interference and suppresses an order of diffraction parallel to the optical axis. The optical axis is perpendicular to the object plane. The imaging optics comprises a cylindrical lens, which is aligned in parallel to the lines and is designed to image the object plane into the image plane.