Methods and devices for detecting open and/or shorts circuits in MEMS micro-mirror devices

According to the present invention there is provided methods and devices for detecting open and/or short circuits in MEMS micro-mirror devices, which use relative comparisons of voltage levels within the MEMS micro-mirror devices for detecting the occurrence of open and/or short circuits.

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Bibliographische Detailangaben
Hauptverfasser:	Abele, Nicolas, Chevallaz, Eric
Format:	Patent
Sprache:	eng
Schlagworte:	ADVERTISING ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICESUSING STATIC MEANS TO PRESENT VARIABLE INFORMATION BASIC ELECTRONIC CIRCUITRY CRYPTOGRAPHY DISPLAY EDUCATION ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION PULSE TECHNIQUE SEALS TESTING
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Beschreibung
Zusammenfassung:	According to the present invention there is provided methods and devices for detecting open and/or short circuits in MEMS micro-mirror devices, which use relative comparisons of voltage levels within the MEMS micro-mirror devices for detecting the occurrence of open and/or short circuits.