Method for fabricating semiconductor device
The instant disclosure discloses method comprising receiving a substrate; disposing a dielectric layer over the substrate; disposing a metallic material on the dielectric layer; disposing a passivation layer on top surface of the metallic material; and performing an alloy layer formation process to...
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| Hauptverfasser: | , , |
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| Format: | Patent |
| Sprache: | eng |
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| Zusammenfassung: | The instant disclosure discloses method comprising receiving a substrate; disposing a dielectric layer over the substrate; disposing a metallic material on the dielectric layer; disposing a passivation layer on top surface of the metallic material; and performing an alloy layer formation process to dispose a SiGe layer across top surface of the passivation layer. |
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