Movement apparatus with decoupled position controllers

The disclosure relates to a method for operating a movement apparatus having a first assembly and a second assembly. The first assembly includes a base and several permanent-magnet arrangements that are connected to the base via actuators such that they move as a whole relative to the base in at lea...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Frangen, Joachim
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The disclosure relates to a method for operating a movement apparatus having a first assembly and a second assembly. The first assembly includes a base and several permanent-magnet arrangements that are connected to the base via actuators such that they move as a whole relative to the base in at least one degree of freedom by the assigned actuator, the second assembly including a base and a permanent-magnet arrangement arranged firmly relative to the base. Position controllers are provided, each with a controlled variable and with a correcting variable. The controlled variable is one of six possible degrees of freedom with regard to a relative position between the first and second assembly. The correcting variable represents a force or a torque that has been assigned to the degree of freedom. Desired positions of the actuators are computed from the correcting variables and the actuators are set accordingly.