Image sensors

An image sensor includes a semiconductor substrate having a first surface and a second surface, a pixel element isolation film extending through an interior of the semiconductor substrate and defining a plurality of active pixels in the semiconductor substrate, and a dummy element isolation film ext...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Song, Chung-ho, Jeong, Hee-geun, Lee, Gyeong-hee, Kim, Sun-Hyun, Kim, Han-seok, Han, Dae-han
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:An image sensor includes a semiconductor substrate having a first surface and a second surface, a pixel element isolation film extending through an interior of the semiconductor substrate and defining a plurality of active pixels in the semiconductor substrate, and a dummy element isolation film extending through the interior of the semiconductor substrate and extending along at least one side of the active pixels in a plan view and defining a plurality of dummy pixels in the semiconductor substrate. The pixel element isolation film may have a first end that is substantially coplanar with the first surface and has a first width in a first direction parallel to the first surface, and the dummy element isolation film has a first end that is substantially coplanar with the first surface and has a second width that is greater than the first width of the pixel element isolation film.