Charged particle beam device having inspection scan direction based on scan with smaller dose

Charged particle beam device having inspection scan direction based on scan with smaller dose

A charged particle beam device is provided which minimizes the beam irradiation amount while maintaining a high measurement success rate. The charged particle beam device includes a control device for controlling a scan deflector on the basis of selection of a predetermined number n of frames, where...

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Hauptverfasser: Kawano, Hajime, Shimizu, Kumiko, Itai, Hideki, Mori, Wataru, Hoque, Shahedul
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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creator Kawano, Hajime
Shimizu, Kumiko
Itai, Hideki
Mori, Wataru
Hoque, Shahedul
description A charged particle beam device is provided which minimizes the beam irradiation amount while maintaining a high measurement success rate. The charged particle beam device includes a control device for controlling a scan deflector on the basis of selection of a predetermined number n of frames, wherein the control device controls the scan deflector so that a charged particle beam is selectively scanned on a portion on a sample corresponding to a pixel satisfying a predetermined condition or a region including the portion on the sample from an image obtained by scanning the charged particle beam for a number m of frames (m≥1), the number m of frames being smaller than the number n of frames.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US10984981B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US10984981B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US10984981B23</originalsourceid><addsrcrecordid>eNqNizEOgkAQRWksjHqH8QAmohbQSjT2amnIsPuBSZZls7PB62uBvdXPe3l_mb2qnmMHS4FjEuNADXggi0kMqOdJfEfiNcAkGT2pYU9W4owN6_f7829JPenAziGSHRXrbNGyU2zmXWXb6-VR3XYIYw0NbOCR6uc935fFqSzy8-H4T_MB1I88Jg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Charged particle beam device having inspection scan direction based on scan with smaller dose</title><source>esp@cenet</source><creator>Kawano, Hajime ; Shimizu, Kumiko ; Itai, Hideki ; Mori, Wataru ; Hoque, Shahedul</creator><creatorcontrib>Kawano, Hajime ; Shimizu, Kumiko ; Itai, Hideki ; Mori, Wataru ; Hoque, Shahedul</creatorcontrib><description>A charged particle beam device is provided which minimizes the beam irradiation amount while maintaining a high measurement success rate. The charged particle beam device includes a control device for controlling a scan deflector on the basis of selection of a predetermined number n of frames, wherein the control device controls the scan deflector so that a charged particle beam is selectively scanned on a portion on a sample corresponding to a pixel satisfying a predetermined condition or a region including the portion on the sample from an image obtained by scanning the charged particle beam for a number m of frames (m≥1), the number m of frames being smaller than the number n of frames.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY</subject><creationdate>2021</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210420&amp;DB=EPODOC&amp;CC=US&amp;NR=10984981B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,309,782,887,25571,76555</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20210420&amp;DB=EPODOC&amp;CC=US&amp;NR=10984981B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Kawano, Hajime</creatorcontrib><creatorcontrib>Shimizu, Kumiko</creatorcontrib><creatorcontrib>Itai, Hideki</creatorcontrib><creatorcontrib>Mori, Wataru</creatorcontrib><creatorcontrib>Hoque, Shahedul</creatorcontrib><title>Charged particle beam device having inspection scan direction based on scan with smaller dose</title><description>A charged particle beam device is provided which minimizes the beam irradiation amount while maintaining a high measurement success rate. The charged particle beam device includes a control device for controlling a scan deflector on the basis of selection of a predetermined number n of frames, wherein the control device controls the scan deflector so that a charged particle beam is selectively scanned on a portion on a sample corresponding to a pixel satisfying a predetermined condition or a region including the portion on the sample from an image obtained by scanning the charged particle beam for a number m of frames (m≥1), the number m of frames being smaller than the number n of frames.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNizEOgkAQRWksjHqH8QAmohbQSjT2amnIsPuBSZZls7PB62uBvdXPe3l_mb2qnmMHS4FjEuNADXggi0kMqOdJfEfiNcAkGT2pYU9W4owN6_f7829JPenAziGSHRXrbNGyU2zmXWXb6-VR3XYIYw0NbOCR6uc935fFqSzy8-H4T_MB1I88Jg</recordid><startdate>20210420</startdate><enddate>20210420</enddate><creator>Kawano, Hajime</creator><creator>Shimizu, Kumiko</creator><creator>Itai, Hideki</creator><creator>Mori, Wataru</creator><creator>Hoque, Shahedul</creator><scope>EVB</scope></search><sort><creationdate>20210420</creationdate><title>Charged particle beam device having inspection scan direction based on scan with smaller dose</title><author>Kawano, Hajime ; Shimizu, Kumiko ; Itai, Hideki ; Mori, Wataru ; Hoque, Shahedul</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US10984981B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRICITY</topic><toplevel>online_resources</toplevel><creatorcontrib>Kawano, Hajime</creatorcontrib><creatorcontrib>Shimizu, Kumiko</creatorcontrib><creatorcontrib>Itai, Hideki</creatorcontrib><creatorcontrib>Mori, Wataru</creatorcontrib><creatorcontrib>Hoque, Shahedul</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kawano, Hajime</au><au>Shimizu, Kumiko</au><au>Itai, Hideki</au><au>Mori, Wataru</au><au>Hoque, Shahedul</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Charged particle beam device having inspection scan direction based on scan with smaller dose</title><date>2021-04-20</date><risdate>2021</risdate><abstract>A charged particle beam device is provided which minimizes the beam irradiation amount while maintaining a high measurement success rate. The charged particle beam device includes a control device for controlling a scan deflector on the basis of selection of a predetermined number n of frames, wherein the control device controls the scan deflector so that a charged particle beam is selectively scanned on a portion on a sample corresponding to a pixel satisfying a predetermined condition or a region including the portion on the sample from an image obtained by scanning the charged particle beam for a number m of frames (m≥1), the number m of frames being smaller than the number n of frames.</abstract><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title Charged particle beam device having inspection scan direction based on scan with smaller dose
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-04T04%3A13%3A47IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Kawano,%20Hajime&rft.date=2021-04-20&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS10984981B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true