Force detecting device and robot

A force detecting device having a first axis and a second axis orthogonal to each other, the first axis being a force detection axis, the force detecting device including a laminated body formed by laminating a first electrode, a first quartz plate, a second electrode, a second quartz plate, a third...

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Bibliographische Detailangaben
1. Verfasser: Kamiya, Toshiyuki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A force detecting device having a first axis and a second axis orthogonal to each other, the first axis being a force detection axis, the force detecting device including a laminated body formed by laminating a first electrode, a first quartz plate, a second electrode, a second quartz plate, a third electrode, a third quartz plate, a fourth electrode, a fourth quartz plate, and a fifth electrode in this order and a force detection circuit configured to detect a force in a direction of the first axis based on an electric charge output from the second electrode and an electric charge output from the fourth electrode.