Resist composition, method of forming resist pattern, and polymer compound

To provide a resist composition and a method for forming a resist pattern achieving improvement in resolution, particularly in electron beam or EUV lithography.SOLUTION: The resist composition generates an acid by exposure and shows changes in the solubility with a developer by an action of an acid,...

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Bibliographische Detailangaben
Hauptverfasser:	Suzuki, Kenta, Yahagi, Masahito, Yamazaki, Hiroto
Format:	Patent
Sprache:	eng
Schlagworte:	ADHESIVES APPARATUS SPECIALLY ADAPTED THEREFOR CHEMICAL PAINT OR INK REMOVERS CHEMISTRY CINEMATOGRAPHY COATING COMPOSITIONS, e.g. PAINTS, VARNISHES ORLACQUERS COMPOSITIONS BASED THEREON CORRECTING FLUIDS DYES ELECTROGRAPHY FILLING PASTES HOLOGRAPHY INKS MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS THEREFOR METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PAINTS PASTES OR SOLIDS FOR COLOURING OR PRINTING PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS POLISHES THEIR PREPARATION OR CHEMICAL WORKING-UP USE OF MATERIALS THEREFOR WOODSTAINS
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Beschreibung
Zusammenfassung:	To provide a resist composition and a method for forming a resist pattern achieving improvement in resolution, particularly in electron beam or EUV lithography.SOLUTION: The resist composition generates an acid by exposure and shows changes in the solubility with a developer by an action of an acid, and the composition comprises a polymeric compound (A1) having a structural unit (a0) derived from a compound represented by general formula (a0-1) below and a structural unit (a10) derived from a compound represented by general formula (a10-1) below, and having no structural unit represented by general formula (1). In the formulae, Raand Rarepresent a polymerizable group-containing group; Waand Warepresent an aromatic hydrocarbon group having a valence of (n+1) or (n+1); nand nrepresent an integer of 1 to 3; and Zrepresents Fe, Co, Ni, Cr or Ru.SELECTED DRAWING: None