Sensor device with carbon nanotube sensor positioned on first and second substrates

A sensing device includes a first substrate having a plurality of TSVs extending therethrough, and a second substrate positioned adjacent the first substrate, with the TSVs being electrically connected to the second substrate. At least one carbon nanotube sensor is positioned on the first substrate....

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Bibliographische Detailangaben
Hauptverfasser:	Safron, Nathaniel S, Meyer, Matthew Wayne
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A sensing device includes a first substrate having a plurality of TSVs extending therethrough, and a second substrate positioned adjacent the first substrate, with the TSVs being electrically connected to the second substrate. At least one carbon nanotube sensor is positioned on the first substrate. Each of a plurality of contact pads is positioned on the first substrate and on one of the carbon nanotube sensors such that each contact pad is electrically connected to one of the TSVs and the one of the carbon nanotube sensors, and such that an end of the one of the carbon nanotube sensors is embedded in the contact pad.