Foreign substance removal apparatus and foreign substance detection apparatus

An apparatus for removing at least one foreign substance includes a detection unit detecting the at least one foreign substance adhered to a holding surface of a suction holding unit configured to suck and hold a substrate, a removal unit removing the at least one foreign substance adhered to the ho...

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Bibliographische Detailangaben
Hauptverfasser: Otsuka, Yoshitaka, Hirakawa, Osamu
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An apparatus for removing at least one foreign substance includes a detection unit detecting the at least one foreign substance adhered to a holding surface of a suction holding unit configured to suck and hold a substrate, a removal unit removing the at least one foreign substance adhered to the holding surface using fluid, and a movement mechanism configured to move the detection unit and the removal unit.