Coupled accordion springs in microelectromechanical systems (MEMS) devices

Microelectromechanical systems (MEMS) devices are described that include a proof mass movably connected to a substrate by accordion springs disposed on opposite sides of the proof mass, with a coupler coupling two of the accordion springs together. The coupler is a bar in some implementations, and m...

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Bibliographische Detailangaben
Hauptverfasser:	Zhang, Qian, Yang, Kuang L, Gu, Lei
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY GENERATION HEATING INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT LIGHTING MACHINES OR ENGINES FOR LIQUIDS MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK MECHANICAL ENGINEERING MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOTOTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISEPROVIDED FOR MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PHYSICS PRODUCING MECHANICAL POWER SPRING, WEIGHT, INERTIA OR LIKE MOTORS TESTING TRANSPORTING WEAPONS WIND, SPRING WEIGHT AND MISCELLANEOUS MOTORS
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Beschreibung
Zusammenfassung:	Microelectromechanical systems (MEMS) devices are described that include a proof mass movably connected to a substrate by accordion springs disposed on opposite sides of the proof mass, with a coupler coupling two of the accordion springs together. The coupler is a bar in some implementations, and may be rigid. The coupler therefore restricts the motion of the accordion springs relative to each other. In this manner, the motion of the proof mass may be restricted to preferred types and frequencies.