Multi-layer actuator electrode configuration for resonance improvement

A piezoelectric actuator assembly is described. The piezoelectric actuator assembly includes a first, second and third active piezoelectric layers. The first layer includes a top surface and a bottom surface. The second layer includes a top surface and a bottom surface over the top surface of the fi...

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Bibliographische Detailangaben
Hauptverfasser: Glaess, David, Ee, Kuen Chee, Sudachun, Preecha, Pankaew, Ekaratch, Zhang, Long
Format: Patent
Sprache:eng
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Zusammenfassung:A piezoelectric actuator assembly is described. The piezoelectric actuator assembly includes a first, second and third active piezoelectric layers. The first layer includes a top surface and a bottom surface. The second layer includes a top surface and a bottom surface over the top surface of the first layer. The third layer includes a top surface and a bottom surface over the top surface of the second layer. The first and second layers can define a first effective electrode length. Similarly, the second and third layers can define a second effective electrode length configured to be longer than the first effective electrode length.