Semiconductor device having buried gate structure and method for fabricating the same

A method for fabricating a semiconductor device includes: forming a gate trench in a semiconductor substrate; forming a gate dielectric layer over a bottom surface and sidewalls of the gate trench; forming a first work function layer over the gate dielectric layer; doping a work function adjustment...

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Bibliographische Detailangaben
Hauptverfasser: Jang, Tae-Su, Park, Jin-Chul, Park, Ji-Hwan, Ryu, Seong-Wan, Jang, Il-Sik, Ham, Dae-Jin, Kwon, Se-In, Shin, Jung-Ho
Format: Patent
Sprache:eng
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Zusammenfassung:A method for fabricating a semiconductor device includes: forming a gate trench in a semiconductor substrate; forming a gate dielectric layer over a bottom surface and sidewalls of the gate trench; forming a first work function layer over the gate dielectric layer; doping a work function adjustment element to form a second work function layer which overlaps with the sidewalls of the gate trench; forming a gate conductive layer that partially fills the gate trench; and forming doped regions inside the semiconductor substrate on both sides of the gate trench.