Fine dust concentration sensor

A fine dust concentration sensor includes a bulk acoustic resonator and a cap including an upper portion with holes therein and a lateral portion connected to the upper portion to accommodate the bulk acoustic resonator. An upper surface of the upper portion of the cap is coated with a hydrophobic m...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Son, Jin Suk, Lee, Hwa Sun, Shin, Ran Hee, Lee, Tae Kyung, Kyoung, Je Hong
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A fine dust concentration sensor includes a bulk acoustic resonator and a cap including an upper portion with holes therein and a lateral portion connected to the upper portion to accommodate the bulk acoustic resonator. An upper surface of the upper portion of the cap is coated with a hydrophobic material.