Semiconductor structure and manufacturing method for the same

The present disclosure provides a method for method for forming a semiconductor structure, including providing a substrate with a first well region of a first conductivity type, forming a silicon layer over the first well region, forming a first silicon fin over the first well region, and applying a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lee, Pei-Wei, Hung, Tsungyu, Tsai, Pang-Yen
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present disclosure provides a method for method for forming a semiconductor structure, including providing a substrate with a first well region of a first conductivity type, forming a silicon layer over the first well region, forming a first silicon fin over the first well region, and applying a silicon-free gas source upon the first silicon fin.