Metal oxide based radiation sensor

A metal oxide based radiation sensor includes a titanium dioxide (TiO2) thin film layer on a microcantilever surface. The TiO2 thin film layer initially comprises anatase and rutile crystal structures. Exposure to radiation, such as gamma radiation, results in changes in structural features and mech...

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Bibliographische Detailangaben
Hauptverfasser: Shamma, Khaled Zouher, Albrithen, Hamad Abdulaziz, Alodhayb, Abdullah Nasser
Format: Patent
Sprache:eng
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Zusammenfassung:A metal oxide based radiation sensor includes a titanium dioxide (TiO2) thin film layer on a microcantilever surface. The TiO2 thin film layer initially comprises anatase and rutile crystal structures. Exposure to radiation, such as gamma radiation, results in changes in structural features and mechanical behaviors of the metal oxide based radiation sensor. In particular, the resonant frequency changes with exposure to radiation dosages. The structural and mechanical behaviors of the metal oxide based radiation sensor change proportionally with dosage within a range of dosages.