X-ray inspection apparatus

Provided is an X-ray inspection apparatus that can inspect an object to be inspected with high sensitivity by using a multiple-stage X-ray sensor without widening a slit of a collimator, and can prevent the apparatus from becoming large-sized due to prevention of X-ray leakage. An X-ray inspection a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Saito, Naoya, Miyazaki, Itaru
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASUREMENT OF NUCLEAR OR X-RADIATION MEASURING NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	Provided is an X-ray inspection apparatus that can inspect an object to be inspected with high sensitivity by using a multiple-stage X-ray sensor without widening a slit of a collimator, and can prevent the apparatus from becoming large-sized due to prevention of X-ray leakage. An X-ray inspection apparatus includes an X-ray irradiation portion having an X-ray tube generating an X-ray, an X-ray sensor having detection element arrays in a plurality of stages in a carrying direction, the detection element arrays each formed of a plurality of detection elements linearly arranged in a main scanning direction orthogonal to the carrying direction on a plane parallel to the carrying surface of an object to be inspected, a collimator restricting an X-ray irradiation region for the X-ray sensor, and an imaging condition input section that designates one or more detection element arrays to be used for inspection.