Optical inspection tool and method

A method of inspecting a device under test for defects includes detecting intensity and directional information of radiation rays emanating from a device under test by a light field camera, generating synthesized images of the device under test detected by the light field camera, and determining a d...

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Bibliographische Detailangaben
Hauptverfasser:	Murata, Taiki, Shigematsu, Satoshi, Yoshitake, Yasuhiro
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A method of inspecting a device under test for defects includes detecting intensity and directional information of radiation rays emanating from a device under test by a light field camera, generating synthesized images of the device under test detected by the light field camera, and determining a depth of a defect in the device under test from the synthesized images.