Matching device

A matching device includes a directional coupler, a matching circuit including a first variable capacitance capacitor and a second variable capacitance capacitor, and a control unit. The control unit calculates a reflection coefficient on the basis of a forward power and a reflected power that are d...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Fujimoto, Naoya, Kato, Norikazu, Oshida, Yoshiyuki
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS RESONATORS RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE WAVEGUIDES
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Beschreibung
Zusammenfassung:	A matching device includes a directional coupler, a matching circuit including a first variable capacitance capacitor and a second variable capacitance capacitor, and a control unit. The control unit calculates a reflection coefficient on the basis of a forward power and a reflected power that are detected by the directional coupler, changes the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor such that the calculated reflection coefficient becomes smaller, and makes the cycle of calculation of the set values of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor shorter than the cycle of acquisition of the capacitance value of the first variable capacitance capacitor and the capacitance value of the second variable capacitance capacitor.