Axially compliant bearing for precision positioning

An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the sta...

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Bibliographische Detailangaben
Hauptverfasser: Okwudire, Chinedum E, Yoon, Deokkyun D, Dong, Xin
Format: Patent
Sprache:eng
Schlagworte:
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