Axially compliant bearing for precision positioning

An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the sta...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Okwudire, Chinedum E, Yoon, Deokkyun D, Dong, Xin
Format:	Patent
Sprache:	eng
Schlagworte:	BEARINGS BLASTING ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING LIGHTING MECHANICAL ENGINEERING ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	An axially compliant rolling bearing for precision motion stages having a stage, at least one bearing member slidably disposed along a rail, and a compliant joint interconnecting the at least one roller bearing to the stage. The compliant joint is sufficiently compliant to permit movement of the stage in the axial direction while remaining stiff in other directions orthogonal to the axial direction.