Vacuum pump
A vacuum pump comprises: a base; a rotor shaft rotatably provided at the base; a rotor including rotor blades arranged in multiple stages and a rotor cylindrical portion, and attached to the rotor shaft; stationary blades each arranged between adjacent ones of the rotor blades, the stationary blades...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A vacuum pump comprises: a base; a rotor shaft rotatably provided at the base; a rotor including rotor blades arranged in multiple stages and a rotor cylindrical portion, and attached to the rotor shaft; stationary blades each arranged between adjacent ones of the rotor blades, the stationary blades and the rotor blades forming a turbo exhaust portion; a stator forming, together with the rotor cylindrical portion, a screw groove exhaust portion; and a hexagon socket head cap screw configured to fix the stator to an upper surface of the base in a guiding path of the screw groove exhaust portion to which gas is guided from the turbo exhaust portion. The hexagon socket head cap screw is a bolt having a smaller height of a head portion than that of a hexagon socket head cap screw according to a provision of a country of use or an international organization. |
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