Field-effect transistors with self-aligned and non-self-aligned contact openings

Structures for a field-effect transistor and methods of forming a field-effect transistor. A sidewall spacer is arranged adjacent to a sidewall of a gate electrode, a source/drain region is arranged laterally adjacent to the sidewall spacer, and a contact is arranged over the source/drain region and...

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Bibliographische Detailangaben
Hauptverfasser: Borjemscaia, Natalia, Jaeger, Daniel, Dechene, Daniel J, Dechene, Jessica, Narasimha, Shreesh, Siddiqui, Naved, Aquilino, Michael
Format: Patent
Sprache:eng
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Zusammenfassung:Structures for a field-effect transistor and methods of forming a field-effect transistor. A sidewall spacer is arranged adjacent to a sidewall of a gate electrode, a source/drain region is arranged laterally adjacent to the sidewall spacer, and a contact is arranged over the source/drain region and laterally adjacent to the sidewall spacer. The contact is coupled with the source/drain region. A section of an interlayer dielectric layer is laterally arranged between the contact and the sidewall spacer.