Standby port and substrate processing apparatus having the same

Standby port and substrate processing apparatus having the same

Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Choi, Youngjun, Kim, Jonghan, Yu, Jin Tack, Bang, Byungsun, Jung, Buyoung, Kim, Heehwan, Jang, Young Jin, Kim, Daehun, Shin, Cheol-Yong, Park, Gui Su, Woo, Jonghyeon
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator Choi, Youngjun
Kim, Jonghan
Yu, Jin Tack
Bang, Byungsun
Jung, Buyoung
Kim, Heehwan
Jang, Young Jin
Kim, Daehun
Shin, Cheol-Yong
Park, Gui Su
Woo, Jonghyeon
description Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US10825699B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US10825699B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US10825699B23</originalsourceid><addsrcrecordid>eNrjZLAPLknMS0mqVCjILypRADIVikuTikuKEktSFQqK8pNTi4sz89IVEgsKEoFipcUKGYllIIGSjFSF4sTcVB4G1rTEnOJUXijNzaDo5hri7KGbWpAfn1pckJicmpdaEh8abGhgYWRqZmnpZGRMjBoAxj4xhg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Standby port and substrate processing apparatus having the same</title><source>esp@cenet</source><creator>Choi, Youngjun ; Kim, Jonghan ; Yu, Jin Tack ; Bang, Byungsun ; Jung, Buyoung ; Kim, Heehwan ; Jang, Young Jin ; Kim, Daehun ; Shin, Cheol-Yong ; Park, Gui Su ; Woo, Jonghyeon</creator><creatorcontrib>Choi, Youngjun ; Kim, Jonghan ; Yu, Jin Tack ; Bang, Byungsun ; Jung, Buyoung ; Kim, Heehwan ; Jang, Young Jin ; Kim, Daehun ; Shin, Cheol-Yong ; Park, Gui Su ; Woo, Jonghyeon</creatorcontrib><description>Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.</description><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20201103&amp;DB=EPODOC&amp;CC=US&amp;NR=10825699B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20201103&amp;DB=EPODOC&amp;CC=US&amp;NR=10825699B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Choi, Youngjun</creatorcontrib><creatorcontrib>Kim, Jonghan</creatorcontrib><creatorcontrib>Yu, Jin Tack</creatorcontrib><creatorcontrib>Bang, Byungsun</creatorcontrib><creatorcontrib>Jung, Buyoung</creatorcontrib><creatorcontrib>Kim, Heehwan</creatorcontrib><creatorcontrib>Jang, Young Jin</creatorcontrib><creatorcontrib>Kim, Daehun</creatorcontrib><creatorcontrib>Shin, Cheol-Yong</creatorcontrib><creatorcontrib>Park, Gui Su</creatorcontrib><creatorcontrib>Woo, Jonghyeon</creatorcontrib><title>Standby port and substrate processing apparatus having the same</title><description>Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLAPLknMS0mqVCjILypRADIVikuTikuKEktSFQqK8pNTi4sz89IVEgsKEoFipcUKGYllIIGSjFSF4sTcVB4G1rTEnOJUXijNzaDo5hri7KGbWpAfn1pckJicmpdaEh8abGhgYWRqZmnpZGRMjBoAxj4xhg</recordid><startdate>20201103</startdate><enddate>20201103</enddate><creator>Choi, Youngjun</creator><creator>Kim, Jonghan</creator><creator>Yu, Jin Tack</creator><creator>Bang, Byungsun</creator><creator>Jung, Buyoung</creator><creator>Kim, Heehwan</creator><creator>Jang, Young Jin</creator><creator>Kim, Daehun</creator><creator>Shin, Cheol-Yong</creator><creator>Park, Gui Su</creator><creator>Woo, Jonghyeon</creator><scope>EVB</scope></search><sort><creationdate>20201103</creationdate><title>Standby port and substrate processing apparatus having the same</title><author>Choi, Youngjun ; Kim, Jonghan ; Yu, Jin Tack ; Bang, Byungsun ; Jung, Buyoung ; Kim, Heehwan ; Jang, Young Jin ; Kim, Daehun ; Shin, Cheol-Yong ; Park, Gui Su ; Woo, Jonghyeon</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US10825699B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2020</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>Choi, Youngjun</creatorcontrib><creatorcontrib>Kim, Jonghan</creatorcontrib><creatorcontrib>Yu, Jin Tack</creatorcontrib><creatorcontrib>Bang, Byungsun</creatorcontrib><creatorcontrib>Jung, Buyoung</creatorcontrib><creatorcontrib>Kim, Heehwan</creatorcontrib><creatorcontrib>Jang, Young Jin</creatorcontrib><creatorcontrib>Kim, Daehun</creatorcontrib><creatorcontrib>Shin, Cheol-Yong</creatorcontrib><creatorcontrib>Park, Gui Su</creatorcontrib><creatorcontrib>Woo, Jonghyeon</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Choi, Youngjun</au><au>Kim, Jonghan</au><au>Yu, Jin Tack</au><au>Bang, Byungsun</au><au>Jung, Buyoung</au><au>Kim, Heehwan</au><au>Jang, Young Jin</au><au>Kim, Daehun</au><au>Shin, Cheol-Yong</au><au>Park, Gui Su</au><au>Woo, Jonghyeon</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Standby port and substrate processing apparatus having the same</title><date>2020-11-03</date><risdate>2020</risdate><abstract>Disclosed are a standby port and a substrate processing apparatus having the same. The standby port exhausts fumes generated when a processing liquid is discharged into the standby port before the supply of the processing liquid onto a substrate, thereby preventing pollution of a chamber atmosphere.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng
recordid cdi_epo_espacenet_US10825699B2
source esp@cenet
subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Standby port and substrate processing apparatus having the same
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-11T19%3A56%3A55IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Choi,%20Youngjun&rft.date=2020-11-03&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS10825699B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true