Innovative imaging technique in transmission charged particle microscopy

A method of using a Transmission Charged Particle Microscope, comprising:- Providing a specimen on a specimen holder;- Using an illumination system to direct a beam of charged particles from a source onto said specimen;- Using an imaging system to direct charged particles that are transmitted through the specimen onto a detector,further comprising the following actions:- In an acquisition step, lasting a time interval T, using said detector in particle counting mode to register spatiotemporal data relating to individual particle detection incidences, and to output said spatiotemporal data in raw form, without assembly into an image frame;- In a subsequent rendering step, assembling a final image from said spatiotemporal data, while performing a mathematical correction operation.