Microscope, observation method, and a storage medium

A microscope, including: an illumination optical system that irradiates a specimen with illumination light from an oblique direction; an observation optical system including an objective lens; and a controller that moves at least one of a stage to hold the specimen and the objective lens in a same d...

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Bibliographische Detailangaben
Hauptverfasser:	Nakada, Chieko, Matsui, Kumiko, Tomosugi, Wataru
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PICTORIAL COMMUNICATION, e.g. TELEVISION TESTING
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Beschreibung
Zusammenfassung:	A microscope, including: an illumination optical system that irradiates a specimen with illumination light from an oblique direction; an observation optical system including an objective lens; and a controller that moves at least one of a stage to hold the specimen and the objective lens in a same direction as an optical axis of the objective lens. The controller changes, when moving at least one of the stage and the objective lens, an incident angle of the illumination light with respect to the specimen.