Photonic degradation monitoring for semiconductor devices

Methods of testing a semiconductor, and semiconductor testing apparatus, are described. In an example, a method for testing a semiconductor can include applying light on the semiconductor to induce photonic degradation. The method can also include receiving a photoluminescence measurement induced fr...

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Bibliographische Detailangaben
Hauptverfasser: Rim, Seung Bum, Soltz, David Aitan, Shen, Yu-Chen, Tracy, Kieran Mark, Johnson, Michael C, Qiu, Taiqing, Tu, Xiuwen
Format: Patent
Sprache:eng
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Zusammenfassung:Methods of testing a semiconductor, and semiconductor testing apparatus, are described. In an example, a method for testing a semiconductor can include applying light on the semiconductor to induce photonic degradation. The method can also include receiving a photoluminescence measurement induced from the applied light from the semiconductor and monitoring the photonic degradation of the semiconductor from the photoluminescence measurement.