Method for protecting a MEMS unit against infrared investigations and MEMS unit
A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon...
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| creator | Kunz, Ulrich Zinober, Sven Willers, Oliver Curcic, Michael |
| description | A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US10793425B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US10793425B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US10793425B23</originalsourceid><addsrcrecordid>eNrjZPD3TS3JyE9RSMsvUigoyi9JTS7JzEtXSFTwdfUNVijNyyxRSExPzMwrLlHIzEsrSixKTQEyylKLSzLTE0sy8_OKFRLzUhCqeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJfGiwoYG5pbGJkamTkTExagD40zZQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Method for protecting a MEMS unit against infrared investigations and MEMS unit</title><source>esp@cenet</source><creator>Kunz, Ulrich ; Zinober, Sven ; Willers, Oliver ; Curcic, Michael</creator><creatorcontrib>Kunz, Ulrich ; Zinober, Sven ; Willers, Oliver ; Curcic, Michael</creatorcontrib><description>A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.</description><language>eng</language><subject>AMUSEMENTS ; APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING,CLIMBING, OR FENCING ; BALL GAMES ; GAMES ; HUMAN NECESSITIES ; MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES ; MICROSTRUCTURAL TECHNOLOGY ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PERFORMING OPERATIONS ; PHYSICS ; PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS ; SPORTS ; TRAINING EQUIPMENT ; TRANSPORTING</subject><creationdate>2020</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201006&DB=EPODOC&CC=US&NR=10793425B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20201006&DB=EPODOC&CC=US&NR=10793425B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Kunz, Ulrich</creatorcontrib><creatorcontrib>Zinober, Sven</creatorcontrib><creatorcontrib>Willers, Oliver</creatorcontrib><creatorcontrib>Curcic, Michael</creatorcontrib><title>Method for protecting a MEMS unit against infrared investigations and MEMS unit</title><description>A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.</description><subject>AMUSEMENTS</subject><subject>APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING,CLIMBING, OR FENCING</subject><subject>BALL GAMES</subject><subject>GAMES</subject><subject>HUMAN NECESSITIES</subject><subject>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</subject><subject>MICROSTRUCTURAL TECHNOLOGY</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICS</subject><subject>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</subject><subject>SPORTS</subject><subject>TRAINING EQUIPMENT</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2020</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPD3TS3JyE9RSMsvUigoyi9JTS7JzEtXSFTwdfUNVijNyyxRSExPzMwrLlHIzEsrSixKTQEyylKLSzLTE0sy8_OKFRLzUhCqeRhY0xJzilN5oTQ3g6Kba4izh25qQX58anFBYnJqXmpJfGiwoYG5pbGJkamTkTExagD40zZQ</recordid><startdate>20201006</startdate><enddate>20201006</enddate><creator>Kunz, Ulrich</creator><creator>Zinober, Sven</creator><creator>Willers, Oliver</creator><creator>Curcic, Michael</creator><scope>EVB</scope></search><sort><creationdate>20201006</creationdate><title>Method for protecting a MEMS unit against infrared investigations and MEMS unit</title><author>Kunz, Ulrich ; Zinober, Sven ; Willers, Oliver ; Curcic, Michael</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US10793425B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2020</creationdate><topic>AMUSEMENTS</topic><topic>APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING,CLIMBING, OR FENCING</topic><topic>BALL GAMES</topic><topic>GAMES</topic><topic>HUMAN NECESSITIES</topic><topic>MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES</topic><topic>MICROSTRUCTURAL TECHNOLOGY</topic><topic>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</topic><topic>OPTICS</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICS</topic><topic>PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS</topic><topic>SPORTS</topic><topic>TRAINING EQUIPMENT</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>Kunz, Ulrich</creatorcontrib><creatorcontrib>Zinober, Sven</creatorcontrib><creatorcontrib>Willers, Oliver</creatorcontrib><creatorcontrib>Curcic, Michael</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kunz, Ulrich</au><au>Zinober, Sven</au><au>Willers, Oliver</au><au>Curcic, Michael</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Method for protecting a MEMS unit against infrared investigations and MEMS unit</title><date>2020-10-06</date><risdate>2020</risdate><abstract>A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | AMUSEMENTS APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING,CLIMBING, OR FENCING BALL GAMES GAMES HUMAN NECESSITIES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SPORTS TRAINING EQUIPMENT TRANSPORTING |
| title | Method for protecting a MEMS unit against infrared investigations and MEMS unit |
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