Method for protecting a MEMS unit against infrared investigations and MEMS unit

A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon...

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Bibliographische Detailangaben
Hauptverfasser:	Kunz, Ulrich, Zinober, Sven, Willers, Oliver, Curcic, Michael
Format:	Patent
Sprache:	eng
Schlagworte:	AMUSEMENTS APPARATUS FOR PHYSICAL TRAINING, GYMNASTICS, SWIMMING,CLIMBING, OR FENCING BALL GAMES GAMES HUMAN NECESSITIES MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PERFORMING OPERATIONS PHYSICS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SPORTS TRAINING EQUIPMENT TRANSPORTING
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Beschreibung
Zusammenfassung:	A method for protecting a MEMS unit, in particular a MEMS sensor, against infrared investigations, at least one area of the MEMS unit being doped, the at least one doped area absorbing, reflecting or diffusely scattering more than 50%, in particular more than 90%, of an infrared light incident upon it.