Vacuum evaporation device and system

A vacuum evaporation device and system comprises a material container and a recycling structure, wherein a nozzle is arranged on the upper end surface of the material container; the recycling structure is arranged around the nozzle; and the recycling structure is configured to receive material when...

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Bibliographische Detailangaben
Hauptverfasser:	Ma, Qun, Zhou, Da, Mo, Zailong, Xu, Jin
Format:	Patent
Sprache:	eng
Schlagworte:	APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ATOMISING APPARATUS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY NOZZLES PERFORMING OPERATIONS SPRAYING APPARATUS SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING
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Beschreibung
Zusammenfassung:	A vacuum evaporation device and system comprises a material container and a recycling structure, wherein a nozzle is arranged on the upper end surface of the material container; the recycling structure is arranged around the nozzle; and the recycling structure is configured to receive material when the material sprayed from the nozzle is fallen down. By arranging the recycling structure, the deposited material is received when it is fallen down, so that the nozzle is prevented from being clogged by the fallen material.