Vibration isolation device, lithographic apparatus and method to tune a vibration isolation device

wherein the vibration isolation device comprises a stiffness adjustment device configured to adjust the stiffness of the inverted pendulum device.

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Bibliographische Detailangaben
Hauptverfasser:	Seijger, Olav Johannes, Van Lankvelt, Alexander Petrus Josephus
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR BLASTING CINEMATOGRAPHY ELECTROGRAPHY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING HOLOGRAPHY LIGHTING MACHINES OR ENGINES FOR LIQUIDS MATERIALS THEREFOR MEANS FOR DAMPING VIBRATION MECHANICAL ENGINEERING MECHANICAL-POWER PRODUCING DEVICES OR MECHANISMS, NOTOTHERWISE PROVIDED FOR OR USING ENERGY SOURCES NOT OTHERWISEPROVIDED FOR OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRODUCING MECHANICAL POWER SHOCK-ABSORBERS SPRING, WEIGHT, INERTIA OR LIKE MOTORS SPRINGS THERMAL INSULATION IN GENERAL WEAPONS WIND, SPRING WEIGHT AND MISCELLANEOUS MOTORS
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Beschreibung
Zusammenfassung:	wherein the vibration isolation device comprises a stiffness adjustment device configured to adjust the stiffness of the inverted pendulum device.