Oriented piezoelectric film, method for producing the oriented piezoelectric film, and liquid dispensing head

An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.

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Bibliographische Detailangaben
Hauptverfasser: Kobayashi, Motokazu, Kotani, Yoshinori, Ohashi, Yoshihiro
Format: Patent
Sprache:eng
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Zusammenfassung:An oriented piezoelectric film, wherein a crystal forming the oriented piezoelectric film, is a perovskite type crystal of the general formula of Ba1-xCaxTi1-yZryO3 (0≤x≤0.2, and 0≤y≤0.2), and the oriented piezoelectric film has (111) orientation according to a pseudocubic crystal notation.